| Materials 
 | Filter element 
 | Hydrophobic PTFE membrane supported by molded PFA structure | 
		
			|  | Housing | Electropolished VAR 316L stainless steel | 
		
			| Downstream cleanliness | Less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 µm | 
		
			|  | Volatiles | <10 ppb moisture | 
		
			| Removal rating | ≥0.0015 µm |  | 
		
			| Surface finish interior | ≤7 µin Ra |  | 
		
			| Helium leak rating | Qualified | 2 × 10-10 cc/sec | 
		
			|  | Tested | 1 × 10-9 cc/sec | 
		
			| Operating conditions | Maximum inlet pressure | 207 bar (3000 psig) @ 23°C (73°F) | 
		
			|  | Maximum forward differential pressure | 4 bar (60 psid) @ 23°C (73°F) 
 | 
		
			|  | Maximum reverse differential pressure | 0.07 MPa (0.7 bar,10 psid) @ 23°C (73°F) 
 | 
		
			|  | Maximum operating temperature | 120°C (248°F) | 
		
			| Particle retention 
 | Greater than 99.9999999% (9 LRV) removal of all particles @ 30 slpm (referenced at the most penetrating particle size) | 
		
			| Flow rating | Refer to performance data |